• Liberty International India

Z-Axis Piezo Nanopositioners

Aerotech has launched Z-axis Piezo Nanopositioners for extreme precision applications, QNP-Z series, adding to the growing piezo stage family that includes the QNP-L linear and QNP-XY stages. The QNP-Z series provides the resolution, linearity, repeatability, and high dynamics required for the most demanding applications from microscopy to optics alignment. With resolution to 0.15 nm, linearity to 0.007%, and repeatability to 1 nm, nanometer-level precision is assured. With high dynamics (resonant frequency and stiffness) users can achieve higher throughput in exacting processes. A variety of travels (100 ?m to 600 ?m), feedback options, and vacuum versions add to the exceptional versatility of this stage series. QNP-Z piezo stages are guided by precision flexures that are optimised using finite element analysis. The resulting design offers outstanding stiffness and resonant frequency (up to 1050 Hz) enabling high process throughput and fast closed-loop response. These stages have been designed to provide excellent geometric performance (straightness and angular errors) while at the same time minimizing the overall stage package size. All QNP piezo stages offer optional closed-loop feedback using a unique capacitive sensor design for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.