Piezo Nanopositioner, 0.15 NM Resolution

Piezo Nanopositioner, 0.15 NM Resolution


Aerotech’s QFOCUS™ QF-46 Piezo Nanopositioning stage series enables microscope objective and optics positioning at high-speeds with nanometer-level performance. It is available in closed-loop travels of 100 ?m and 250 ?m, and open-loop travels of 120 ?m and 300 ?m. The QF-46 is designed with next-generation optical instruments and laser machines in mind. The QF-46 can perform better than competitive offerings with larger and heavier higher numerical aperture (NA) objectives due to its higher inherent stiffness. It is perfect for any demanding optical application requiring high precision and throughput with long travels. QFOCUS QF-46 is guided by precision flexures that are optimised using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. In addition, the QF-46 has been designed to provide excellent geometric performance (straightness and angular errors) for critical microscopy and optics positioning applications.

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