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Linear Piezo Nanopositioning Stages
Linear Piezo Nanopositioning Stages
Aerotech’s QNPHD Linear Piezo Nanopositioning Stages provide the benefits of both a stage and actuator in one compact, high-stiffness package. With a direct-metrology, capacitive sensor feedback option, high resonant frequencies, and high load capacity, the QNPHD is ideal for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing, and semiconductor wafer articulation. A direct-drive actuation design and optimised structure enable millisecond response and move-and-settle times. FEA optimised precision flexures ensure high-stiffness, long device life, and high-dynamics while maintaining excellent geometric performance (straightness and angular errors) for critical nanopositioning applications. Optional closed-loop feedback using a unique capacitive sensor design allows for sub-nanometer resolution and single-digit nanometer linearity errors. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability. When coupled with Aerotech’s Q-series controllers and drives, the QNPHD demonstrates sub-nanometer positioning resolution and high-positioning bandwidth. Aerotech’s Dynamic Controls Toolbox and Motion Designer software packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. Aerotech’s FlashConfig feature automatically identifies the stage, all operational parameters, and uploads axis calibration data ensuring safe, accurate, and true “plug-and-play†operation.
