Xy Linear Motor Stages, Low-Profile

Xy Linear Motor Stages, Low-Profile


Aerotech has introduced a series of integrated open-frame Linear Motor Stages with precise geometric performance and micrometer-level straightness. The new PlanarDLA stages include high precision roller bearings, precision machined surfaces and non-contact linear motors that drive through the axes’ centre of stiffness. These features result in straightness to ±0.5µm and flatness to ±1.25µm. The low-profile stages are designed for a wide range of applications from highly dynamic two-sided LED wafer processing to quasi-static optical metrology. There are nine models in the series to accommodate customer requirements for travel and accuracy. The PlanarDLA enables high-throughput, high-accuracy processing with 2 m/s velocities and 2 g accelerations, resulting in superior process yield and a low total cost of ownership. It achieves high servo bandwidths while maximizing the clear aperture available and keeping the overall height to a minimum.

  • Semiconductor manufacturing
  • Electronics manufacturing (LEDs)
  • Test and inspection
  • Laser processing
  • Metals inspection
  • Micro-machining
  • Nanotechnology
  • Medical
  • Laboratory
  • Optical metrology
  • Wafer processing
  • Metrology
  • Automation

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