• Liberty International India

XY Linear Motor Stage

Aerotech’s PlanarDLA integrated, open-frame XY Linear Motor Stages have high dynamics and exceptional geometric performance in a low-profile package. These stages are essential for applications ranging from two-sided LED wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high-accuracy and precise geometric performance are necessary. The PlanarDLA XY design is optimised for applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and non-contact direct-drive linear motors driving through the axes’ centre-of-stiffness result in a positioning stage with straightness to ±0.5 µm and flatness to ±1.25 µm. Structural elements are optimised for high dynamics and high stiffness for the most demanding dynamic applications. The PlanarDLA achieves high servo bandwidths while at the same time maximizing the clear aperture available and keeping the overall height to a minimum. The PlanarDLA enables high-throughput, high-accuracy processing with 2 m/s velocities and 2 g accelerations, resulting in superior process yield and a low total cost of ownership. At the heart of the PlanarDLA is Aerotech’s proprietary direct-drive technology. This allows for unmatched performance compared to other competitive screw-based and linear motor designs. Only non-contact, direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life.