• Liberty International India

XY Piezo Nanopositioners

Aerotech has launched XY Piezo Nanopositioners for extreme precision applications. QNP-XY series piezo nanopositioning stages provide the resolution, linearity, repeatability, and high dynamics required for the most demanding applications from microscopy to optics alignment. With resolution to 0.15 nm, linearity to 0.007%, and repeatability to 2 nm, nanometer-level precision is assured. With the highest dynamics (resonant frequency and stiffness) of any other comparable stage in size and travel, users can achieve higher throughput in exacting processes. A variety of travels (100 ?m to 600 ?m), feedback options, and vacuum versions add to the exceptional versatility of this stage series. QNP piezo stages are guided by precision flexures that are optimised using finite element analysis. The resulting design offers outstanding stiffness and resonant frequency (up to 885 Hz) enabling high process throughput and fast closed-loop response. Furthermore, the integrated XY package minimizes stage stack height and moving mass, resulting in superior static and dynamic multi-axis performance. All QNP piezo stages offer optional closed-loop feedback using a unique capacitive sensor design for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.