AMETEK Rotron has exhibited its SemiCool custom cooling subsystems for high-reliability cooling of semiconductor production processes at Semicon Japan. Including the Rotron MAXIAX vaneaxial fans originally designed for critical military and aerospace applications, the SemiCool systems offer precise temperature control in a compact package.

Complete SemiCool systems include high reliability fans, optimised heat exchangers and custom ductwork. Alternatively, customers can integrate the MAXIAX fans into their own cooling subsystems.

Optimised fans with diameters ranging from 152.4 mm (6”) to 203.2 mm (8”) provide airflows of 425 l/s (900 CFM) at 254mm WG (10 IWG), with efficiencies approaching 60%. This is a significant departure from standard 0.9 m (3’) tall industrial blowers commonly used in semiconductor production facilities. Designed to operate with 400 Hz industrial power converters, the fans feature rapid response, infinite speed control and minimal space requirements – all designed to support consistent system operating temperatures.

Applications are in: semiconductor fabrication; semiconductor production equipment OEMs; lamp cooling; thermally controlled process air circulation; process heat removal; control electronics generated heat; vapor deposition; etching process an wafer fabrication.

SemiCool systems can meet the cooling needs of all heat-intensive process steps in semiconductor production. Systems are compliant with semiconductor industry traceability and configuration control requirements. They can be certified to TUV requirements and are produced in a AS9100, ISO9001 manufacturing environment.

AMETEK Rotron is a division of AMETEK Inc., a leading global manufacturer of electronic instruments and electromechanical devices with annual sales of US$4.0 billion.