Versatile Vacuum Coater

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Versatile Vacuum Coater


Milman Thin Film Systems offers a versatile vacuum coater. Features: provides common platform for thermal evaporation and electron beam evaporation with indexable four sources; all stainless steel (SS 304) construction of vacuum chamber valves and plumbing lines along with all viton O-rings and seals; state-of-the-art quartz IR lamp based substrate heating mechanism; complete push button operation for vacuum pump down control using electro-pneumatic valves; glow discharge plasma cleaning facility for pre-cleaning of substrates; diffusion pump based system with a close cycle refrigerated chevron baffle for cleaner vacuum; all interlocks for cooling water, low vacuum, compressed air failure, etc., for safe operation; active mimic display for system status indication; large number of extra ports for adding various process options; automatic pump down control with flexibility for complete automatic operation (optional); substrate rotation facility with optional planar drive; low maintenance and low downtime (high reliability); and micro controller based digital Pirani and penning gauges controller with six set point relays for automatic control and feedback.

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