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Magnetron sputtering cathodes
Magnetron sputtering cathodes
Milman Thin Film Systems offers a range of products in coating technology. Magnetron sputtering cathodes have the following main features: compact and easy to install design; high strength rare earth magnet module allows sputtering of permeable materials; compatibility with DC, pulsed DC or RF operation; high sputtering rate coupled with excellent target utilization; integrated argon gas inlet assembly; optimised turbulent water flow to provide uniform target cooling; low operating pressures; flexibility to accept target in 'clamp on' or 'bonded' configuration to cover broad range of thicknesses down to foils; stable arc free operation throughout life of target; external or internal mounting optional; UBM option available in all categories; and UHV compatible sources are also available.
