Triple Magnetron Sputtering Machine

Triple Magnetron Sputtering Machine


Milman Thin Film Systems offers triple magnetron sputtering machine. This has the following features: three 3"/4”/6"magnetron sputtering cathodes; choice of DC, pulsed DC and/or RF sputtering; substrate rotation to give high uniformity; quartz IR lamp based substrate heater control; flexibility of manual, semiautomatic or complete PLC based automation; substrate bias capability (optional); available with or without load lock facility; and all safety interlocks for operator's safety.

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