DC sputtering power supply

DC sputtering power supply


Milman Thin Film Systems offers DC sputtering power supply available in 2.5, 5 and 10 kW versions.Main features: capability of switching in three separate targets; special purpose ARC detection and suppression circuits; constant current capability with 0.1% regulation; rugged design with capability to run continuously; fits in standard 19" rack; direct indication of voltage; current and power; and safety interlocks - emergency stop; cooling water; over current; low vacuum; and door open.

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