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Mass Flow Controller for Vacuum Industry
Mass Flow Controller for Vacuum Industry
Aeronics eMaROh offers a Mass Flow Controller for Vacuum Industry that features integrated pneumatic shut-off valve. Manufactured by Alicat Scientific for vacuum coating and sputtering processes, MCV mass flow controller provides the tight shut-off parameters required to maintain product integrity. Its integrated pneumatic shut-off valve is normally closed, affording positive shut-off of 1 x 10-9 atm sccm/sec Helium max. The Alicat MCV accurately controls gas flow rates as low as 0.5 sccm or as high as 20 slpm with response times of 50 to 100 milliseconds. Fast response times can greatly improve vacuum coating end products and help eliminate target poisoning. Pre-programmed with calibrations for 30 gases, the MCV displays mass flow, volumetric flow, absolute pressure and temperature. The unit may be programmed directly through the instrument’s keypad or remotely via RS-232 (RS-485 also available). The MCV uses the same patented laminar flow differential pressure (DP) technology as all Alicat Scientific flow instruments, is supplied with NIST traceable certification and carries the CE mark. The company designs and manufactures mass flow devices used in medical and scientific instrumentation, as well as specialty industrial applications, for high-precision measurement of gas and liquid flows. Its products include mass and liquid flow meters and controllers; pressure controllers; digital pressure and vacuum gauges; portable flow meters; calibration standards; software and accessories.