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Liquid Injection Valve
Liquid Injection Valve
Swagelok has introduced a Liquid Injection Valve in response to the increasing use of liquid precursors in the atomic layer deposition (ALD) process. Featuring the ability to vaporise liquid precursors inside its valve body, the ALD liquid injection valve dispenses precursors and purge gases into ALD tool chambers in precisely measured, precisely timed pulses. The valve is one part of the ultrahigh-purity Swagelok ALD diaphragm valves. In liquid precursor vaporisation technology, high temperatures are required to vaporise a liquid chemical within the valve body. The chemistry is then delivered to the ALD chamber. For consistent precursor delivery, temperature must be tightly controlled. Featuring a high-end PFA seat seal, the ALD liquid injection valve can handle temperatures up to 200°C (392°F). Temperature control can be achieved through heater cartridges optimally placed in the ALD diaphragm valve body. Swagelok uses Finite Element Analysis (FEA) to simulate the temperature effect, enabling customised placement of the heater cartridges according to a tool manufacturer’s particular needs. The full line of Swagelok ALD diaphragm valves feature rapid actuation speed, with valve actuation times less than 5 milliseconds and an ultrahigh cycle life – exceeding 25 million cycles during product evaluation. The patent-pending flow setting feature enables the consistent delivery of process gas. Manufactured from 316L VIM/VAR stainless steel, the valve body is available with 1/4 inch VCR® metal gasket face seal and 1/4 inch and 6 mm tube butt weld end connections. Other available options include a high-flow model, as well as multi-port, multi-valve manifold, and modular surface mount configurations.
