• Angstrom Sciences Inc

Circular Magnetrons

More Advanced, And More Efficient
Circular magnetrons from Angstrom Sciences have rapidly become recognised as the new standard of the sputtering industry. Because in addition to their advanced features such as profiled magnets, turbulent water flow, and solid stainless steel construction - they offer a host of other performance efficiencies as well.
Versatile, Compact Design
The circular magnetron's ultra-compact design makes them ideal for virtually any new or retrofit application - including the most complex multiple-cathode deposition clusters or the smallest vacuum chambers. And they can easily be configured for either internal or external mounts.
Total Power Compatibility
Their low-impedance heads provide RF, DC, mid-frequency DC, pulsed DC, and microwave power compatibility.
Standard Fittings
Angstrom Sciences uses ISO NW standard fittings, as well as ConFlat ® metal seal flanges. All utilities are maintained at atmosphere, and are accessed through standard "O"-ring compression fittings for ease of installation in any vacuum system.
Full Range Of Sizes
Angstrom Sciences circular magnetron sources are available in 1", 2", 3", 4", 5", 6", 8", 10", 12", and 16" target sizes.
Quick, Easy Target Change
Angstrom's patented threaded clamp and anode shield allow you to change targets (sizes 1" to 6") quickly and easily without specialised tools, and their built-in adjustability lets you fit targets of varying thickness without resorting to spacing devices.
Lower Pressure, Higher Power
Angstrom's Magnetrons can operate at extremely low pressure - down to the 10-4 Torr range - and their directly cooled designs can deliver power densities up to 250 watts/in² (39 watts/cm²).
Higher Rates And Performance
That means they can coat a greater area for their cathode size than other magnetrons. So you can maximize both your coating zone and your target utilisation without the kind of trade-off in rate that other magnetrons force you to make.
Greater Target Utilisation
Yet these same advanced magnetrons can give you target utilization as high as 50%.
Greater Uniformity
And, thanks to Angstrom's patented profiled magnets, their magnetrons also deliver much greater uniformity of deposition - routinely in the ±3-to-5% range. (One of their research customers has even documented uniformity of ± .1% with Angstrom Sciences magnetrons.)
Anode Shields
The addition of an anode shield permits operation at lower voltage and pressure, since the distance between the cathode and anode (ground plane) is shorter. It also prevents debris from falling in the space between the anode and cathode, which would cause electrical short circuits and/or arcs. The possibility of coating bolts or target clamps is minimized, if not eliminated. Due to its' location however, there is a possibility of material flaking off the anode shield and causing a short circuit and/or contaminating the target.
Total Commitment
At Angstrom Sciences, they design, engineer, and manufacture their own complete line of magnetron sputtering cathodes for thin film deposition. It's their core business, and they're totally committed to making sure it's done right, every step of the way. So, Angstrom can assure you of the quality and reliability of every product you buy from them. And they stand ready to provide you any help you may need in specification, installation, start-up, and service.
Guaranteed
All Angstrom Sciences magnetrons are guaranteed against defects in workmanship and materials for two full years.