• MKS Instruments

Mass-Flow Sensors

Thermak mass-flow sensors combine a fast acting valve and control circuit. Type 1179 Mass-Flow controller is for medical applications, including thin-film coating, leak testing, and sterilization. It is stable within 0% FS per year and flow curve repeatability is better than ? 0.5% FS over 12 weeks. Overall accuracy of the 1179 Mass-Flo controller is ?1.0% FS including non-linearity, hysteresis, and non-repeatability. Warm-up time is 5 minutes to within 0.2% of FS of steady-state performance.