• Lubi Industries LLP

Flow Sensor

Flow Sensor, FM-200 series can control and manage flows in a wide variety of output modes such as integrated output mode, depending on the required application. A new rectification mechanism and Micro Electro Mechanical System (MEMS) technology allow the sensor to be mounted on a Si sensor chip (3 × 3.5 mm 0.118 × 0.138 in). This provides an extremely small heat capacity, high precision of ±3 % F.S. and high-speed response. The two temperature sensors on each side of the heater detect the heat distribution to make bi-directional detection possible.