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Servo-Operated Pressure Regulator
Servo-Operated Pressure Regulator
Servo-Operated Pressure Regulator, SPR860 is designed for very high flow with medium to low supply pressure and minimal pressure drop. An internal control system monitors both upstream and downstream pressures and servos the regulator in response to fluctuations. This establishes a constant pressure delivery with significant variations. In a typical application, using nitrogen as a medium, with an inlet pressure of 80 psig and an outlet pressure setting of 20 psig, the outlet pressure is maintained within 2 psig of its original setting while the flow demand increases from zero to more than 500 slpm.
- Servo control system does not require an external source to operate nor a continuous bleed to atmosphere.
- 100% Helium Leak and functional tested.
- Cleaned and assembled to “Semiconductor Quality†standards.
- Electropolished and passivated post welding.
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