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Capacitance Based Measurement System
Capacitance Based Measurement System
MTI's Accumeasure System 9000 capacitance based measurement system is for vibration, runout, thickness, displacement, or position sensing measurements. The system is targeted for applications such as X-Y/micropositioning, thickness measurements, wafer and mask alignment/levelling, spindle/drive motor runout, and flatness or profile measurements.
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