Silicon Absolute Pressure Sensor Die With Top Glass Cap

Silicon Absolute Pressure Sensor Die With Top Glass Cap


First Sensor Technology offers Silicon Absolute Pressure Sensor Die with Top Glass Cap. The harsh environmental line is a piezoresistive silicon absolute pressure sensor dies line with a pressure-proportional voltage output signal. Contrary to conventional absolute pressure sensor dies, this device has its reference vacuum chamber under a glass block on the topside of the die. This design allows the measurement of aggressive media applied to the backside of the sensor die. The sensor dies are available with or without bonded glass back plates. The dies are probed and shipped on tape or in waffle packs.

  • Automotive applications
  • White goods
  • Industrial controls
  • Medical applications, etc

  • Encapsulated topside; medium separation for harsh environment
  • Low pressure and temperature hysteresis
  • Fast response, high sensitivity and linearity
  • Fatigue free mono crystalline silicon diaphragm giving high load cycle stability
  • High long term stability
  • Pressure ranges 0..200 kPa …0..1,6 Mpa or customer specific

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