• Fries Research & Technology GmbH

Surface Topography With High Resolution

With a new instrument, the FRT MicroGlider, the investigation of surfaces of any material quantitatively with high resolution becomes possible. The method works non-destructively and requires no further sample preparation. A user friendly software package allows complete numerical analysis of the data. The image processing includes top view, 3D view, virtual lightning and more. Profiles, several algorithms for roughness evaluation or particle counting are also supplied features. The scanning range is 400 5 m x 400 5 m in the standard version, the z-range is 200 5 m. The resolution is better than 100 nm in x- and y-direction, better than 10 nm in z-direction.