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Scatterometer, surface measurement

Scatterometer is a measurement device that uses laser light from UV to IR as a non-destructive probe to measure surface quality, optical performance, smoothness, appearance, defects, and contamination on a variety of materials. The sample is mounted on stages capable of moving in X and Y and/or rotation. The incident angle can be set to any angle up to 85? from surface normal. The detector sweeps around the sample in the incident plane measuring scattered and specular light. During the scan, the computer controls gain, filter and aperture changes through user-defined parameters. The instrument signature is measured separately and can be compared to the sample data. The CASI analysis software simplifies analysis of scatter data. BRDF values are used to calculate TIS, total hemispherical reflectance, PSD, and RMS roughness. Annotated results can be printed out for use as viewgraphs or publication-ready figures. Applications: optical surfaces; diffuse materials; semiconductor wafers; ?signature verification; magnetic storage media; ?precision machined surfaces; advanced materials; polarization transformation studies; and cosmetic appearance.