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Supercritical Point Drying Systems for EM & MEMS Applications
Supercritical Point Drying Systems for EM & MEMS Applications
MCube Technologies Pvt Ltd offers Supercritical Point Drying Systems for EM and MEMS Applications. The supercritical Autosamdri®-815B, Series B System was developed by Dr A J Tousimis and a team of associates, with smooth operation and precise control the trademark attributes; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 4", 3", 2" wafers or 10 mm square die per process run. Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturised mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of micro fabrication.
- Microprocessor controller allows for complete automatic processing
- All internal surfaces are inert to CO2 and ultra pure alcohols
- Repeatable operating parameters insuring reproducibility of results
- Integrated temperature controls
- Internal rupture disc built in for safety
- Processes up to 5 x 4" dia wafers per run
- Comes with additional HF compatible wafer holders to process 5 x 3", 5 x 2" diameter wafers or 5 x 10 mm square die (Tousimis HF compatible wafer holders can be used to transport and process wafers and die from HF)
- All electronic components meet CE, UL and/or US Military Specifications
- Static pressure control module pre-set for automatic safe pressure stability
- 0.4µm internal filtration systems deliver clean filtered LCO2 to process chamber
- Under-lit chamber with viewing window facilitates operator chamber status viewing
- An efficient adiabatic cooling system, capable of cooling the chamber from ambient room temperature to near 0ºC, in less than 3 minutes and maintains temperature automatically during both Fill and Purge modes
- LEDs instantly indicate process mode at a glance
- Clean room static-free compatible design
- For added safety and convenience, the US patented SOTERâ„¢ condenser quietly captures exhaust and alcohols.
Supercritical Point Drying Systems for EM MEMS Applications
Supercritical Point Drying Systems
Drying Systems
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